发明授权
- 专利标题: Rotational speed sensor
- 专利标题(中): 转速传感器
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申请号: US10258218申请日: 2003-05-29
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公开(公告)号: US06691571B2公开(公告)日: 2004-02-17
- 发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
- 申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
- 优先权: DE10108198 20010221
- 主分类号: G01C1900
- IPC分类号: G01C1900
摘要:
An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.
公开/授权文献
- US20030183007A1 Rotational speed sensor 公开/授权日:2003-10-02
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