Invention Grant
US06660604B1 Method of forming double junction region and method of forming transfer transistor using the same 有权
形成双结区域的方法和使用其形成转移晶体管的方法

  • Patent Title: Method of forming double junction region and method of forming transfer transistor using the same
  • Patent Title (中): 形成双结区域的方法和使用其形成转移晶体管的方法
  • Application No.: US10314442
    Application Date: 2002-12-09
  • Publication No.: US06660604B1
    Publication Date: 2003-12-09
  • Inventor: Kyung Pil HwangSeoung Ouk Choi
  • Applicant: Kyung Pil HwangSeoung Ouk Choi
  • Priority: KR10-2002-0042173 20020718
  • Main IPC: H01L21336
  • IPC: H01L21336
Method of forming double junction region and method of forming transfer transistor using the same
Abstract:
The present invention relates to a method of forming a dual junction region and a method of forming a transfer transistor using the same. A low-concentration junction region is formed. A high-concentration junction region is formed at a portion of the low-concentration junction region by performing a high-concentration ion implantation process an ion implantation mask for an interlayer dielectric film in which a contact hole is formed so that the portion of the low-concentration junction region is exposed. With this structure, the distance between the high-concentration junction region and the well is sufficiently secured by controlling the distance between the high-concentration junction region and the well using the width of the contact hole formed in the interlayer dielectric film. Therefore, a stable characteristic can be secured upon application of a subsequent high voltage bias.
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