发明授权
- 专利标题: Seed layer
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申请号: US09981851申请日: 2001-10-17
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公开(公告)号: US06660154B2公开(公告)日: 2003-12-09
- 发明人: David Merricks , Denis Morrissey , Martin W. Bayes , Mark Lefebvre , James G. Shelnut , Donald E. Storjohann
- 申请人: David Merricks , Denis Morrissey , Martin W. Bayes , Mark Lefebvre , James G. Shelnut , Donald E. Storjohann
- 主分类号: C23C2800
- IPC分类号: C23C2800
摘要:
Disclosed are methods for repairing or enhancing discontinuous metal seed layers prior to subsequent metallization during the manufacture of electronic devices. Such repair methods do not require the use of a second electroplating bath.
公开/授权文献
- US20020084193A1 Seed layer 公开/授权日:2002-07-04
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