Invention Grant
US06658948B2 Semiconductor dynamic quantity sensor 有权
半导体动量传感器

  • Patent Title: Semiconductor dynamic quantity sensor
  • Patent Title (中): 半导体动量传感器
  • Application No.: US10053705
    Application Date: 2002-01-24
  • Publication No.: US06658948B2
    Publication Date: 2003-12-09
  • Inventor: Shinji YoshiharaYasutoshi Suzuki
  • Applicant: Shinji YoshiharaYasutoshi Suzuki
  • Priority: JP2001-024187 20010131; JP2001-113078 20010411; JP2001-221697 20010723
  • Main IPC: G01L122
  • IPC: G01L122
Semiconductor dynamic quantity sensor
Abstract:
A bridge circuit includes four gage resistors. Each gage resistor is divided into two division gage resistors. A couple of division gage resistors. The junction points between division gage resistors outputting the same potential when no pressure is applied are used for diagnostic. Four gage resistors out of the eight gage resistors are arranged near the center of diaphragm 14, and the other four division resistors are arranged near the peripheral edge portion of the diaphragm 14 to make the stress distribution even.
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