Invention Grant
- Patent Title: High mobility transistors in SOI and method for forming
- Patent Title (中): SOI中的高迁移率晶体管和形成方法
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Application No.: US09683656Application Date: 2002-01-30
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Publication No.: US06624478B2Publication Date: 2003-09-23
- Inventor: Brent A. Anderson , Xavier Baie , Randy W. Mann , Edward J. Nowak , Jed H. Rankin
- Applicant: Brent A. Anderson , Xavier Baie , Randy W. Mann , Edward J. Nowak , Jed H. Rankin
- Main IPC: H01L2701
- IPC: H01L2701
![High mobility transistors in SOI and method for forming](/abs-image/US/2003/09/23/US06624478B2/abs.jpg.150x150.jpg)
Abstract:
The present invention provides a device design and method for forming Field Effect Transistors (FETs) that have improved performance without negative impacts to device density. The present invention forms high-gain p-channel transistors by forming them on silicon islands where hole mobility has been increased. The hole mobility is increased by applying physical straining to the silicon islands. By straining the silicon islands, the hole mobility is increased resulting in increased device gain. This is accomplished without requiring an increase in the size of the devices, or the size of the contacts to the devices.
Public/Granted literature
- US20030141548A1 HIGH MOBILITY TRANSISTORS IN SOI AND METHOD FOR FORMING Public/Granted day:2003-07-31
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