Invention Grant
- Patent Title: Method for calibrating optical-based metrology tools
- Patent Title (中): 校准光学计量工具的方法
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Application No.: US10255509Application Date: 2002-09-26
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Publication No.: US06623994B1Publication Date: 2003-09-23
- Inventor: James Broc Stirton
- Applicant: James Broc Stirton
- Main IPC: H01L2166
- IPC: H01L2166
Abstract:
The present invention is generally directed to various methods for calibrating optical-based metrology tools. In one illustrative embodiment, the method comprises performing a metrology process on a specimen using an optical-based metrology tool to obtain optical characteristic data and comparing the obtained optical characteristic data to target optical characteristic data established for the specimen.
Information query
