- 专利标题: Alternative photoresist stripping solutions
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申请号: US10164793申请日: 2002-06-06
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公开(公告)号: US06586164B2公开(公告)日: 2003-07-01
- 发明人: James R. Machac, Jr. , Edward T. Marquis , Wheeler C. Crawford
- 申请人: James R. Machac, Jr. , Edward T. Marquis , Wheeler C. Crawford
- 主分类号: G03F742
- IPC分类号: G03F742
摘要:
The present invention is directed toward effective photoresist stripping compositions that are less corrosive and do not cause skin irritation. One form of the present invention is a composition useful as a photoresist remover that includes an alkylene carbonate, and one or more additional components chosen from the group that includes alkyl hydrogen peroxides, hydroxyalkyl ureas, urea-hydrogen peroxides, N-substituted morpholines and alcohols. Another form of the present invention is a composition for removing photoresist from a surface that includes an N-substituted morpholine.
公开/授权文献
- US20020155393A1 Alternative photoresist stripping solutions 公开/授权日:2002-10-24
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