- 专利标题: Thin film transistor with sub-gates and schottky source/drain and a manufacturing method of the same
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申请号: US09879967申请日: 2001-06-14
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公开(公告)号: US06555424B2公开(公告)日: 2003-04-29
- 发明人: Horng-Chih Lin , Ming-Shih Tsai , Tiao-Yuan Huang
- 申请人: Horng-Chih Lin , Ming-Shih Tsai , Tiao-Yuan Huang
- 优先权: TW89111706A 20000615
- 主分类号: H01L21338
- IPC分类号: H01L21338
摘要:
The present invention discloses a thin film transistor with sub-gates and Schottky source/drain and a method of manufacturing the same. Doping of source/drain, and the following annealing steps used conventionally are omitted and the complexity of process and process costs are reduced. The temperature of the process is also decreased. A thin film transistor with sub-gates and Schottky source/drain of the invention is able to operate in both the n type and p type channel modes on the same transistor element depending on the biased voltage of the sub-gate. Moreover, an electric junction is formed by induction, using bias voltage applied on the sub-gate, which takes the place of the conventional source/drain extensions. Consequently, the off-state leakage current is reduced.
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