Invention Grant
US06522053B1 Field emission element, fabrication method thereof, and field emission display 失效
场发射元件,其制造方法和场发射显示

  • Patent Title: Field emission element, fabrication method thereof, and field emission display
  • Patent Title (中): 场发射元件,其制造方法和场发射显示
  • Application No.: US09056937
    Application Date: 1998-04-08
  • Publication No.: US06522053B1
    Publication Date: 2003-02-18
  • Inventor: Yuichi IwaseMasami Okita
  • Applicant: Yuichi IwaseMasami Okita
  • Priority: JP9-093669 19970411
  • Main IPC: H01J130
  • IPC: H01J130
Field emission element, fabrication method thereof, and field emission display
Abstract:
A field emission display having element including a first electrode, and a second electrode laminated to the first electrode through an insulating layer. The first electrode has an opening; the second electrode has a hole of a planar shape corresponding to that of the opening at a position matched with the opening; and the insulating layer has a through-hole continuous to the opening and the hole. An upper edge portion of the hole is formed into a cross-sectional shape having an edge angle in a range of 80 to 100°, and at least part of the upper edge portion of the hole is exposed in the through-hole. In this element, electrons are emitted from the second electrode through the upper edge portion of the hole exposed in the through-hole by applying a specific voltage between the first electrode and the second electrode. With this configuration, a distance between the gate electrode and a field emission portion of the cathode electrode can be accurately controlled with a simple structure. To enhance an emission efficiency of electrons, a second gate electrode may be provided on the lower side of the cathode electrode through an insulating layer.
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