Invention Grant
US06475369B1 Method for electrochemical fabrication 有权
电化学制造方法

  • Patent Title: Method for electrochemical fabrication
  • Patent Title (中): 电化学制造方法
  • Application No.: US09487408
    Application Date: 2000-01-18
  • Publication No.: US06475369B1
    Publication Date: 2002-11-05
  • Inventor: Adam L. Cohen
  • Applicant: Adam L. Cohen
  • Main IPC: C25D502
  • IPC: C25D502
Method for electrochemical fabrication
Abstract:
An electroplating method includes forming a layer, the forming of the layer includes: a) contacting a substrate with a first article, the first article includes a support and a conformable mask disposed in a pattern on the support; b) electroplating a first metal from a source of metal ions onto the substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the substrate. The method may further involve one or more of (1) selectively depositing or non-selectively depositing one or more additional materials to complete formation of the layer, (2) planarizing deposited material after each deposition or after all depositions for a layer, and/or (3) forming layers adjacent previously formed layers to build up a structure from a plurality of adhered layers. Electroplating articles and electroplating apparatus are also disclosed.
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