Invention Grant
- Patent Title: Method for electrochemical fabrication
- Patent Title (中): 电化学制造方法
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Application No.: US09487408Application Date: 2000-01-18
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Publication No.: US06475369B1Publication Date: 2002-11-05
- Inventor: Adam L. Cohen
- Applicant: Adam L. Cohen
- Main IPC: C25D502
- IPC: C25D502

Abstract:
An electroplating method includes forming a layer, the forming of the layer includes: a) contacting a substrate with a first article, the first article includes a support and a conformable mask disposed in a pattern on the support; b) electroplating a first metal from a source of metal ions onto the substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the substrate. The method may further involve one or more of (1) selectively depositing or non-selectively depositing one or more additional materials to complete formation of the layer, (2) planarizing deposited material after each deposition or after all depositions for a layer, and/or (3) forming layers adjacent previously formed layers to build up a structure from a plurality of adhered layers. Electroplating articles and electroplating apparatus are also disclosed.
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