发明授权
- 专利标题: Packaging of electro-microfluidic devices
- 专利标题(中): 电微流体装置的包装
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申请号: US09790423申请日: 2001-02-21
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公开(公告)号: US06443179B1公开(公告)日: 2002-09-03
- 发明人: Gilbert L. Benavides , Paul C. Galambos , John A. Emerson , Kenneth A. Peterson , Rachel K. Giunta , Robert D. Watson
- 申请人: Gilbert L. Benavides , Paul C. Galambos , John A. Emerson , Kenneth A. Peterson , Rachel K. Giunta , Robert D. Watson
- 主分类号: F16K2700
- IPC分类号: F16K2700
摘要:
A new architecture for packaging surface micromachined electro-microfluidic devices is presented. This architecture relies on two scales of packaging to bring fluid to the device scale (picoliters) from the macro-scale (microliters). The architecture emulates and utilizes electronics packaging technology. The larger package consists of a circuit board with embedded fluidic channels and standard fluidic connectors (e.g. Fluidic Printed Wiring Board). The embedded channels connect to the smaller package, an Electro-Microfluidic Dual-Inline-Package (EMDIP) that takes fluid to the microfluidic integrated circuit (MIC). The fluidic connection is made to the back of the MIC through Bosch-etched holes that take fluid to surface micromachined channels on the front of the MIC. Electrical connection is made to bond pads on the front of the MIC.
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