发明授权
US06379744B1 Method for coating an integrated circuit substrate 失效
涂覆集成电路基板的方法

  • 专利标题: Method for coating an integrated circuit substrate
  • 专利标题(中): 涂覆集成电路基板的方法
  • 申请号: US08590042
    申请日: 1996-02-05
  • 公开(公告)号: US06379744B1
    公开(公告)日: 2002-04-30
  • 发明人: Hussain GouranlouWayne Fowler
  • 申请人: Hussain GouranlouWayne Fowler
  • 主分类号: B05D512
  • IPC分类号: B05D512
Method for coating an integrated circuit substrate
摘要:
An integrated circuit substrate (10) is uniformly coated with a defect free layer of material (18), while minimizing the volume of material (18) dispensed on to the integrated circuit substrate (10). In one embodiment a first predetermined quantity of material (18) is dispensed on to the integrated circuit substrate (10) while the integrated circuit substrate (10) is not spinning. After the first predetermined quantity of material (18) is dispensed the integrated circuit substrate (10) is radially accelerated to a first predetermined spin speed. A second predetermined quantity of the material (18) is then dispensed on to the first predetermined quantity of material (18), while the integrated circuit substrate (10) is spinning. After the second predetermined quantity of material (18) is dispensed the integrated circuit substrate (10) is radially accelerated to a second predetermined spin speed.
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