发明授权
- 专利标题: Method for coating an integrated circuit substrate
- 专利标题(中): 涂覆集成电路基板的方法
-
申请号: US08590042申请日: 1996-02-05
-
公开(公告)号: US06379744B1公开(公告)日: 2002-04-30
- 发明人: Hussain Gouranlou , Wayne Fowler
- 申请人: Hussain Gouranlou , Wayne Fowler
- 主分类号: B05D512
- IPC分类号: B05D512
摘要:
An integrated circuit substrate (10) is uniformly coated with a defect free layer of material (18), while minimizing the volume of material (18) dispensed on to the integrated circuit substrate (10). In one embodiment a first predetermined quantity of material (18) is dispensed on to the integrated circuit substrate (10) while the integrated circuit substrate (10) is not spinning. After the first predetermined quantity of material (18) is dispensed the integrated circuit substrate (10) is radially accelerated to a first predetermined spin speed. A second predetermined quantity of the material (18) is then dispensed on to the first predetermined quantity of material (18), while the integrated circuit substrate (10) is spinning. After the second predetermined quantity of material (18) is dispensed the integrated circuit substrate (10) is radially accelerated to a second predetermined spin speed.
信息查询