The present invention improves the bowing phenomenon of a biaxially stretched polyester film which comprises stretching the longitudinally stretched cast film laterally at a temperature higher than the glass transition temperature of the polyester film from by 5° C. to by 50° C., staying the laterally stretched film in an intermediate zone for a period from 3 to 30 seconds which has been controlled at a temperature from higher than the lateral stretching temperature by 20° C. or more to lower than a heat setting temperature by 20° C. or less, and then heat-setting at the heat setting temperature which is lower than the melting point of the polyester film from by 30° C. to by 5° C.