Invention Grant
- Patent Title: Holding unit for semiconductor wafer sawing
- Patent Title (中): 用于半导体晶圆锯切的保持单元
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Application No.: US09336306Application Date: 1999-06-18
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Publication No.: US06367467B1Publication Date: 2002-04-09
- Inventor: A. Dempsey McGregor , Marshall P. Toombs , James E. Brooks , Benjamin J. Meadows
- Applicant: A. Dempsey McGregor , Marshall P. Toombs , James E. Brooks , Benjamin J. Meadows
- Main IPC: B28D102
- IPC: B28D102

Abstract:
A holding unit is provided to support an ingot in a semiconductor wafer sawing machine, which minimizes the instability of a blade during a sawing process. The holding unit is formed from substantially the same material as an ingot resting thereon. The holding unit includes a top surface for receiving an ingot, a bottom surface, a pair of side walls, and a cavity formed in the holding unit. The cavity forms a plurality of break points in the holding unit. When contacted by the blade, the holding unit fractures at the break points to minimize the chipping of the wafer.
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