An apparatus and a method for sample current spectroscopy surface measurement to inspect crystailnity of a sample surface. An electron beam is irradiated onto a surface of a sample by an electron gun. A variable voltage source supplies an acceleration voltage which is variable to change an acceleration energy of the electron beam irradiated from the electron gun onto the sample surface. A sample current measurement means measures a sample current which flows into a sample when the electron beam is irradiated from the electron gun onto the sample surface. Variation of the sample current is detected by measuring the sample current by the sample current measurement means when the acceleration energy of the electron beam irradiated by the electron gun onto the sample surface is changed by the variable voltage source, thereby crystallinity of the sample surface is inspected.