发明授权
US06280898B1 Lactone-containing compounds, polymers, resist compositions, and patterning method
有权
含内酯的化合物，聚合物，抗蚀剂组合物和图案化方法
- 专利标题： Lactone-containing compounds, polymers, resist compositions, and patterning method
- 专利标题（中）： 含内酯的化合物，聚合物，抗蚀剂组合物和图案化方法
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申请号： US09404763申请日： 1999-09-24
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公开(公告)号： US06280898B1公开(公告)日： 2001-08-28
- 发明人: Koji Hasegawa , Tsunehiro Nishi , Takeshi Kinsho , Jun Hatakeyama , Osamu Watanabe
- 申请人： Koji Hasegawa , Tsunehiro Nishi , Takeshi Kinsho , Jun Hatakeyama , Osamu Watanabe
- 优先权： JP10-270373 19980925
- 主分类号： G03F7004
- IPC分类号： G03F7004
摘要：
A novel lactone-containing compound is provided as well as a polymer comprising units of the compound. The polymer is used as a base resin to formulate a resist composition having a high sensitivity, resolution and etching resistance.
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