发明授权
- 专利标题: Electrostatic capacity-type pressure sensor with reduced variation in reference capacitance
- 专利标题(中): 电容型压力传感器,参考电容的变化减小
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申请号: US68789申请日: 1998-05-15
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公开(公告)号: US6122973A公开(公告)日: 2000-09-26
- 发明人: Kazuo Nomura , Kiyoshi Tanaka , Satoshi Nakao , Hideki Tanigami , Kazutaka Hayashi
- 申请人: Kazuo Nomura , Kiyoshi Tanaka , Satoshi Nakao , Hideki Tanigami , Kazutaka Hayashi
- 申请人地址: JPX Toyama
- 专利权人: Hokuriku Electric Industry Co., Ltd.
- 当前专利权人: Hokuriku Electric Industry Co., Ltd.
- 当前专利权人地址: JPX Toyama
- 优先权: JPX8-247395 19960919; JPX8-326799 19961206
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L9/12
摘要:
A capacitance-type pressure sensor capable of reducing a variation in reference capacitance. The capacitance-type pressure sensor includes insulating spacer (3b) arranged between a main capacitive electrode (4) and a reference capacitive electrode (5) to couple a base substrate (1) and a diaphragm substrate (2) to each other. The insulating spacer (3b) is patterned so as to restrain a variation in distance between the reference capacitive electrode (5) and a counter electrode (10) arranged on the diaphragm substrate (2). Such construction reduces a variation in capacitance between the reference capacitive electrode (5) and the diaphragm electrode (10), to thereby increase accuracy at which a pressure is measured.
公开/授权文献
- US4752250A Compliant connector 公开/授权日:1988-06-21
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