Invention Grant
- Patent Title: Stage having paired E/I core actuator control
- Patent Title (中): 具有成对的E / I核心执行器控制的阶段
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Application No.: US141762Application Date: 1998-08-27
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Publication No.: US6069417APublication Date: 2000-05-30
- Inventor: Bausan Yuan , Ting-Chien Teng
- Applicant: Bausan Yuan , Ting-Chien Teng
- Applicant Address: JPX
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JPX
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H02K33/12 ; H02K41/02 ; H02K41/00
Abstract:
A fine stage control system for use for instance in a semiconductor lithography machine, uses a pair of opposing (push-pull) E/I core actuators to move the stage with high precision along an axis. The paired actuators are coupled together mathematically in terms of their control characteristics and controlled as a single entity, thereby providing a more efficient control scheme and improved system performance.
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