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US6069417A Stage having paired E/I core actuator control 失效
具有成对的E / I核心执行器控制的阶段

Stage having paired E/I core actuator control
Abstract:
A fine stage control system for use for instance in a semiconductor lithography machine, uses a pair of opposing (push-pull) E/I core actuators to move the stage with high precision along an axis. The paired actuators are coupled together mathematically in terms of their control characteristics and controlled as a single entity, thereby providing a more efficient control scheme and improved system performance.
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