发明授权
- 专利标题： Charge for vertical boat growth process and use thereof
- 专利标题（中）： 负责垂直船生长过程及其使用
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申请号： US975746申请日： 1997-11-21
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公开(公告)号： US6045767A公开(公告)日： 2000-04-04
- 发明人: Xaio Liu , Meng Zhu
- 申请人： Xaio Liu , Meng Zhu
- 申请人地址： CA Fremont
- 专利权人： American Xtal Technology
- 当前专利权人： American Xtal Technology
- 当前专利权人地址： CA Fremont
- 主分类号： C30B29/42
- IPC分类号： C30B29/42 ; C30B11/00 ; C30B11/08 ; H01L21/208 ; H01L21/22 ; C01B33/26
摘要：
In vertical boat growth of GaAs single crystal ingots, graphite powder, in selected amounts, is included in the charge to establish directly related planned target electrical characteristics in the as grown ingots. The electrical characteristics correspond to concentrations of carbon in the as grown ingots.
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