- 专利标题： Process for making a photoactive compound and photoresist therefrom
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申请号： US17446申请日： 1998-02-02
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公开(公告)号： US5936071A公开(公告)日： 1999-08-10
- 发明人: Joseph E. Oberlander
- 申请人： Joseph E. Oberlander
- 申请人地址： VGX
- 专利权人： Clariant Finance (BVI) Limited
- 当前专利权人： Clariant Finance (BVI) Limited
- 当前专利权人地址： VGX
- 主分类号： C07C303/28
- IPC分类号： C07C303/28 ; C07C309/71 ; C07C309/76 ; G03F7/022 ; G03F7/023 ; H01L21/027 ; G03F7/22
摘要：
The present invention provides for process of preparing a photoactive ester compound of high purity using a solid base catalyst, preferably an anionic exchange resin. The invention further provides for preparing and imaging a photosensitive composition comprising such a photoactive compound, a film-forming resin and a solvent composition.
公开/授权文献
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