发明授权
- 专利标题: Polishing fluid composition and polishing method
- 专利标题(中): 抛光液组成和抛光方法
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申请号: US857366申请日: 1997-05-15
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公开(公告)号: US5885334A公开(公告)日: 1999-03-23
- 发明人: Tetsuo Suzuki , Yoshihiro Hara
- 申请人: Tetsuo Suzuki , Yoshihiro Hara
- 申请人地址: JPX Kobe
- 专利权人: Kabushiki Kaisha Kobe Seiko Sho
- 当前专利权人: Kabushiki Kaisha Kobe Seiko Sho
- 当前专利权人地址: JPX Kobe
- 优先权: JPX8-120549 19960515; JPX8-120550 19960515
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; C09K3/14 ; C09K13/04
摘要:
The present invention provides a polishing fluid composition which can effectively polish a surface of a semiconductor silicon wafer or a surface of a film comprising silicon to be formed on silicon wafers with a markedly reduced amount of colloidal silica to be used as abrasives, or a polishing fluid composition which is particularly useful for a polishing step after removal of an oxide layer in a two-step polishing method. The former polishing fluid composition comprises an alkaline suspension which contains a water-soluble silicic acid component, colloidal silica and an alkaline component, and which has a pH value of 8.5 to 13. Meanwhile, the latter polishing fluid composition comprises an alkaline solution which contains a water-soluble silicic acid component and an alkaline component, and which has a pH value of 8.5 to 13; and is substantially free of abrasive particles.
公开/授权文献
- US5391624A Thermosettable compositions 公开/授权日:1995-02-21
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