发明授权
US5817406A Ceramic susceptor with embedded metal electrode and brazing material
connection
失效
陶瓷感受器带有嵌入式金属电极和钎焊材料连接
- 专利标题： Ceramic susceptor with embedded metal electrode and brazing material connection
- 专利标题（中）： 陶瓷感受器带有嵌入式金属电极和钎焊材料连接
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申请号： US591333申请日： 1996-01-24
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公开(公告)号： US5817406A公开(公告)日： 1998-10-06
- 发明人: David W. Cheung , Mark A. Fodor , Christopher Lane , Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
- 申请人： David W. Cheung , Mark A. Fodor , Christopher Lane , Ryusuke Ushikoshi , Hideyoshi Tsuruta , Tomoyuki Fujii
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; H01L21/683 ; H05B6/10 ; B32B3/00
摘要：
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
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