发明授权
- 专利标题: Multiple frequency processing to improve electrical resistivity of blind micro-vias
- 专利标题(中): 多频处理提高了盲孔的电阻率
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申请号: US746425申请日: 1996-11-08
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公开(公告)号: US5731047A公开(公告)日: 1998-03-24
- 发明人: David B. Noddin
- 申请人: David B. Noddin
- 申请人地址: DE Newark
- 专利权人: W.L. Gore & Associates, Inc.
- 当前专利权人: W.L. Gore & Associates, Inc.
- 当前专利权人地址: DE Newark
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; H05K3/00 ; H05K3/46 ; B05D3/02 ; C08J7/18
摘要:
A method of forming a blind-via in a laminated substrate by forming a first conductive layer. A dielectric layer is then formed on the first conductive layer. An exposed second conductive layer is formed on the dielectric layer, with the second conductive layer having a preformed aperture. The dielectric layer is laser drilled through to the first conductive layer to form a blind-via at a location within the preformed aperture of the second conductive layer using a plurality of laser pulses. Each laser pulse has a first energy density per pulse that is greater than an ablation threshold of the dielectric layer and less than an ablation threshold of the first conductive layer. The first conductive layer is then laser drilled for a predetermined number of pulses. Each of the predetermined number of pulses has a second energy density per pulse that is greater than an ablation threshold of the first conductive layer. The predetermined number of pulses cause the surface of the first conductive layer exposed by the laser drilling to become molten.
公开/授权文献
- US5174142A Method and apparatus for guiding a rod to a slitter station 公开/授权日:1992-12-29
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