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US5635715A Process for the characterization of an insulator and the corresponding electron microscope 失效
绝缘子表征方法及相应的电子显微镜

Process for the characterization of an insulator and the corresponding
electron microscope
Abstract:
Process and apparatus for the characterization of an insulator (5) at breakdown with the aid of an electron microscope (1), in which the electron flow rate of the beam (3) is adjusted as a function of in particular backscattered, lost, secondary or absorbed electrons. An automatic controller (9) sensitive to certain sensors (10,12) is provided for this purpose. The electron flow rate is proportional to the voltage to be simulated in the insulator.
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