发明授权
- 专利标题: Positive photoresist composition
- 专利标题(中): 正光致抗蚀剂组合物
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申请号: US647904申请日: 1991-01-30
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公开(公告)号: US5565300A公开(公告)日: 1996-10-15
- 发明人: Kazuya Uenishi , Shinji Sakaguchi , Tadayoshi Kokubo
- 申请人: Kazuya Uenishi , Shinji Sakaguchi , Tadayoshi Kokubo
- 申请人地址: JPX Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX2-022679 19900201
- 主分类号: G03F7/023
- IPC分类号: G03F7/023 ; C07C309/76 ; G03F7/022 ; H01L21/027
摘要:
A photoresist composition is disclosed containing an alkali-soluble resin and a photosensitive substance obtained by reaction of a polyhydroxy compound and (a) a 1,2-naphthoquinonediazido-5-(and/or -4-)sulfonyl chloride(s), said photosensitive substance being a mixture of photosensitive compounds (1) to (3):(1) a photosensitive compound having at least one hydroxyl group per molecule and having a number ratio of 1,2-naphthoquinonediazido-5-(and/or -4-)sulfonyl chloride sulfonate groups to hydroxyl groups within the range of from 3 to 20, contained in the photosensitive substance in an amount of 50 wt % or more;(2) a photosensitive compound where all the hydroxyl groups in the polyhydroxy compound have been 1,2-naphthoquinonediazidosulfonyl-esterified, contained in the photosensitive substance in an amount of 30 wt % to 0 wt %; and(3) a photosensitive compound having three or more hydroxyl groups which have not been 1,2-naphthoquinonediazidosulfonyl-esterified per molecule, contained in the photosensitive substance in an amount of 20 wt % to 0 wt %.The composition is suitable to exposure with g-ray, i-ray and excimer laser to provide a sharp resist image. The photoresist composition also has high sensitivity, high resolving power, precise reproducibility to provide resist images having good sectional shapes, broad development latitude, high heat resistance and good storage stability.
公开/授权文献
- US5725539A Surgical instrument used to clamp a vessel or the like 公开/授权日:1998-03-10
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