Invention Grant
- Patent Title: Non-contact type moving table
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Application No.: US466409Application Date: 1995-06-06
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Publication No.: US5562395APublication Date: 1996-10-08
- Inventor: Nobuto Yamazaki , Minoru Torihata , Shinji Maki
- Applicant: Nobuto Yamazaki , Minoru Torihata , Shinji Maki
- Applicant Address: JPX Tokyo
- Assignee: Kabushiki Kaisha Shinkawa
- Current Assignee: Kabushiki Kaisha Shinkawa
- Current Assignee Address: JPX Tokyo
- Priority: JPX4-227975 19920804
- Main IPC: B23Q1/00
- IPC: B23Q1/00 ; B23Q1/38 ; B23Q1/62 ; B65G7/06 ; F16C29/02 ; F16C32/06 ; H01L21/683 ; H05K13/00 ; F16C37/06
Abstract:
A non-contact type moving table including a guide table having a flat guide surface at the top and a moving table which is placed on the guide table and has a moving surface which faces the guide surface of the guide table. The moving table has air blowing openings that blow out compressed air towards the guide surface of the guide table and air suction openings sucking air from the guide surface of the guide table, thus obtaining a single plane, non-contact type bearing or supporting system via the guide surface and the moving surface. As a result, the structure is simple and overall size can be small with low manufacturing costs. In addition, a wide range of materials can be used to build the moving table system.
Public/Granted literature
- US5061297A Apparatus for and method of providing improved gas separation Public/Granted day:1991-10-29
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