Invention Grant
- Patent Title: System and method for multilayer film production on tape substrate
- Patent Title (中): 胶带基板上多层膜生产的系统和方法
-
Application No.: US248579Application Date: 1994-05-24
-
Publication No.: US5460853APublication Date: 1995-10-24
- Inventor: Michael B. Hintz , Joseph H. Sexton , William C. Mitchell , John W. Ulseth
- Applicant: Michael B. Hintz , Joseph H. Sexton , William C. Mitchell , John W. Ulseth
- Applicant Address: MN St. Paul
- Assignee: Minnesota Mining and Manufacturing Company
- Current Assignee: Minnesota Mining and Manufacturing Company
- Current Assignee Address: MN St. Paul
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C08J7/00 ; C23C14/20 ; C23C14/56 ; G11B5/66 ; G11B5/84 ; G11B5/85 ; C23C16/00
Abstract:
A method of sequential deposition of source materials onto a web substrate. A substrate transfer mechanism imparts continuous movement of a substrate past a plurality of deposition sources during vapor deposition of deposition source materials. Every portion of the substrate is exposed to deposition fluxes from the deposition sources in an alternating periodic manner. The number of source exposures is greater than the number of sources.
Public/Granted literature
- US4842058A Load detection and indicator apparatus for well tubing or the like Public/Granted day:1989-06-27
Information query
IPC分类:
