发明授权
- 专利标题: Optical position detecting apparatus
- 专利标题(中): 光学位置检测装置
-
申请号: US75394申请日: 1993-06-11
-
公开(公告)号: US5434425A公开(公告)日: 1995-07-18
- 发明人: Toshiro Ishiyama
- 申请人: Toshiro Ishiyama
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-178913 19920615; JPX5-163247 19930608
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B11/26 ; G03F9/00 ; G01N21/86
摘要:
An optical position detecting apparatus detects a position level and inclination of a surface of an object to be detected without the need to increase the working distance of an objective optical system. The apparatus includes an objective optical system having a lens arranged to face the surface, an illuminating optical system for supplying a position detecting light beam from the periphery of the objective optical system, a photodetector for generating an electric output corresponding to a light beam received, a condenser optical system for converging a reflected light beam from the surface illumunated with the incident light beam from the illuminating optical system onto a photosensing surface of the photodetector, and a beam directing optical element for directing at least one of the incident light beam and the reflected light beam into an optical path passing through the lens.
公开/授权文献
- USD397783S Blade iron for a ceiling fan 公开/授权日:1998-09-01
信息查询