Invention Grant
- Patent Title: Non-contact type moving table system
- Patent Title (中): 非接触式移动台系统
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Application No.: US115849Application Date: 1993-09-02
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Publication No.: US5431527APublication Date: 1995-07-11
- Inventor: Nobuto Yamazaki , Minoru Torihata , Shinji Maki
- Applicant: Nobuto Yamazaki , Minoru Torihata , Shinji Maki
- Applicant Address: JPX Tokyo
- Assignee: Kabushiki Kaisha Shinkawa
- Current Assignee: Kabushiki Kaisha Shinkawa
- Current Assignee Address: JPX Tokyo
- Priority: JPX4-257568 19920902
- Main IPC: B23Q1/00
- IPC: B23Q1/00 ; B23Q1/26 ; B23Q1/28 ; B23Q1/38 ; B23Q1/62 ; B65G7/06 ; F16C29/02 ; F16C32/06 ; H01L21/68
Abstract:
A non-contact type moving table system comprising a guide table and a moving table. The guide table and the moving table have air holes and vacuum holes on the surfaces facing each other, and compressed air is blown out of the air holes so that a space is created between the moving table and the guide tale, thus the moving table can move above the guide table without making contact with the guide table. In addition, vacuum suction is applied between the guide table and the moving table so that the moving table is stabilized on the guide table. Several modifications are obtained by combining pairs of the guide table and the moving table so that the moving table is moved in any desired horizontal direction. The non-contact type moving table can be simple in structure, compact in size, light in weight and is manufactured at low costs.
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