Invention Grant
- Patent Title: Integratable capacitative pressure sensor
- Patent Title (中): 可集成电容式压力传感器
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Application No.: US198489Application Date: 1994-02-18
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Publication No.: US5431057APublication Date: 1995-07-11
- Inventor: Gunther Zimmer , Jorg Eichholz , Wilfried Mokwa , Michael Kandler , Yiannakis Manoli
- Applicant: Gunther Zimmer , Jorg Eichholz , Wilfried Mokwa , Michael Kandler , Yiannakis Manoli
- Applicant Address: DEX Munich
- Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung e.V.
- Current Assignee Address: DEX Munich
- Priority: DEX4004179.4 19900212
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L9/12
Abstract:
A process for manufacturing an integratable capacitative pressure sensor includes the following steps, starting from a semiconductor substrate (1): application of a guard film (2), precipitation of a polycrystalline semiconductor film (4), doping the polycrystalline semiconductor film (4) and removal of the guard film (2) by etching; then insulating the semiconductor zone (7) from the semiconductor substrate (1), and applying an insulator film (8) on the insulated semiconductor zone (7). The pressure sensor product, which is compatible with CMOS circuits and has increased sensor accuracy, includes a semiconductor zone (7) insulated from the semiconductor substrate (1) and an insulator film (8) applied on the insulated semiconductor zone (7), the polycrystalline semiconductor film (4) being located on the insulator film (8) above the insulated semiconductor zone (7).
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