发明授权
US5389559A Method of forming integrated interconnect for very high density DRAMs
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形成非常高密度DRAM的集成互连的方法
- 专利标题: Method of forming integrated interconnect for very high density DRAMs
- 专利标题(中): 形成非常高密度DRAM的集成互连的方法
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申请号: US161763申请日: 1993-12-02
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公开(公告)号: US5389559A公开(公告)日: 1995-02-14
- 发明人: Chang-Ming Hsieh , Louis L. Hsu , Toshio Mii , Seiki Ogura , Joseph F. Shepard
- 申请人: Chang-Ming Hsieh , Louis L. Hsu , Toshio Mii , Seiki Ogura , Joseph F. Shepard
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242 ; H01L27/108 ; H01L21/70 ; H01L27/00
摘要:
A trench capacitor DRAM cell with Shallow Trench Isolation (STI), a self-aligned buried strap and the method of making the cell. A trench capacitor is defined in a substrate. The trench capacitor's polysilicon (poly) plate is recessed below the surface of the substrate and the trench sidewalls are exposed above the poly. A doped poly layer is deposited over the surface contacting both the sidewall and the trench capacitor's poly plate. Horizontal portions of the poly layer are removed either through chemmech polishing or Reactive Ion Etching (RIE). A shallow trench is formed, removing one formerly exposed trench sidewall and a portion of the trench capacitor's poly plate in order to isolate the DRAM cell from adjacent cells. The remaining poly strap, along the trench sidewall contacting the poly plate, is self aligned to contact the source of the DRAM Pass gate Field Effect Transistor (FET). After the shallow trench is filled with oxide, FET's are formed on the substrate, completing the cell. In an alternate embodiment, instead of recessing the poly plate, a shallow trench is formed spanning the entire width of the trench capacitor. The deposited polysilicon is selectively removed, having straps that strap the poly plate to the shallow trench sidewall.
公开/授权文献
- USD265486S Clapper slate 公开/授权日:1982-07-20
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