Invention Grant
- Patent Title: Method and apparatus for producing compound semiconductor single crystal of high decomposition pressure
- Patent Title (中): 具有高分解压力的化合物半导体单晶的制造方法和装置
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Application No.: US50325Application Date: 1993-05-19
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Publication No.: US5373808APublication Date: 1994-12-20
- Inventor: Koichi Sassa , Takashi Atami , Keiji Shirata
- Applicant: Koichi Sassa , Takashi Atami , Keiji Shirata
- Applicant Address: JPX Tokyo JPX Tokyo JPX Sendai
- Assignee: Mitsubishi Materials Corporation,Research Development Corporation of Japan,Zaidan Hojin Handotai Kenkyu Shinkokai
- Current Assignee: Mitsubishi Materials Corporation,Research Development Corporation of Japan,Zaidan Hojin Handotai Kenkyu Shinkokai
- Current Assignee Address: JPX Tokyo JPX Tokyo JPX Sendai
- Priority: JPX3-239938 19910919; JPX3-242043 19910920
- Main IPC: C30B15/00
- IPC: C30B15/00 ; C30B15/02 ; C30B15/22
Abstract:
An apparatus and a method are presented for preparing a single crystal ingot of a compound semiconductor material which contains a high vapor pressure component. The apparatus includes: a furnace housing 78 housing a cylindrical hermetic vessel 20 having a ceiling plate section 22A and a bottom plate section 42. External heaters 36, 38 and 40 surrounding the hermetic vessel 20, and a vapor pressure control section which communicates hermetically with the vessel 20. The vapor pressure control section includes: a vapor pressure control tube 98 having a hermetic inner space formed between an inner wall 102 and a coaxial outer wall 100; a communication conduit 96 which hermetically communicates the inner space of the vapor pressure control tube 98 with the inner space of the vessel 20; heat pipes 108, 112 extending along at least one of either the inner wall or the outer wall; control heaters 110, 114 disposed both on the inside of the inner wall and on the outside of the outer wall of the vapor pressure control section 98.
Public/Granted literature
- US6027368A Connector assembly having a universal mounting bracket Public/Granted day:2000-02-22
Information query
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