Invention Grant
- Patent Title: Integrated light deflector and method of fabrication therefor
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Application No.: US62128Application Date: 1993-05-14
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Publication No.: US5344746APublication Date: 1994-09-06
- Inventor: Peter Vettiger , Otto Voegeli
- Applicant: Peter Vettiger , Otto Voegeli
- Applicant Address: NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: NY Armonk
- Main IPC: H01L27/15
- IPC: H01L27/15 ; G03F7/00 ; G03F7/20 ; H01S5/00 ; H01S5/042 ; H01S5/18 ; G03C5/00 ; G03C5/04
Abstract:
An integrated light deflector and fabrication method are disclosed. In accordance with the method, a mold is constructed above the surface of a substrate using a thick photo resist and a mask to define a deflector plane. A collimated light beam is applied at an appropriate angle of incidence to the photo resist material and mask. The developed resist provides a mold into which the deflector body is cast, leaving a deflector body whose front surface serves as the deflecting surface.
Public/Granted literature
- USD395654S Power amplifier Public/Granted day:1998-06-30
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