Invention Grant
US5206111A Binders soluble in aqueous alkali and containing silanyl groups in the
side chain for a photosensitive mixture
失效
粘合剂可溶于碱性水溶液,并在侧链中含有用于光敏混合物的硅烷基
- Patent Title: Binders soluble in aqueous alkali and containing silanyl groups in the side chain for a photosensitive mixture
- Patent Title (中): 粘合剂可溶于碱性水溶液,并在侧链中含有用于光敏混合物的硅烷基
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Application No.: US639354Application Date: 1991-01-10
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Publication No.: US5206111APublication Date: 1993-04-27
- Inventor: Peter Wilharm , Gerhard Buhr , Juergen Fuchs
- Applicant: Peter Wilharm , Gerhard Buhr , Juergen Fuchs
- Applicant Address: DEX Frankfurt am Main
- Assignee: Hoechst Aktiengesellschaft
- Current Assignee: Hoechst Aktiengesellschaft
- Current Assignee Address: DEX Frankfurt am Main
- Priority: DEX3811242 19880402
- Main IPC: C08G8/28
- IPC: C08G8/28 ; C08G16/04 ; C08G18/54 ; C08G18/64 ; C08G18/71
Abstract:
A silylated polymeric binder, which is soluble or swellable in alkali, bears a plurality of at least one of aliphatic and aromatic hydroxyl groups, at least a portion of which are derivatized by units of the formulae I and II:[(A--B.sub.n).sub.m C]--[(D.sub.o E.sub.p)BC].sub.u (I)and[(D.sub.o E.sub.p)BC].sub.v (II)which are side chains of the polymeric binder, whereinA denotes a silanyl group containing at least 2 silicon atoms in total linked to each other, but not more than 3 silicon atoms linked to each other in an unbranched chain of silicon atoms;B denotes a bridging group;C denotes a functional group which has formed a covalent bond with an aromatic, aliphatic, or cycloaliphatic hydroxyl group of the binder, the group D, or the group E;D denotes a grafted monohydric or polyhydric aliphatic alcohol;E denotes a grafted monohydric or polyhydric aromatic alcohol;n denotes 0 or 1;m denotes 1 or 2; ando, p, u and v each denote 0 or 1.Photosensitive mixtures containing this binder are resistant to plasma etching, stable on storage and have a high thermal stability.
Public/Granted literature
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