Invention Grant
- Patent Title: Organometallic compounds
- Patent Title (中): 有机金属化合物
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Application No.: US789518Application Date: 1991-11-08
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Publication No.: US5149853APublication Date: 1992-09-22
- Inventor: Dietrich Erdmann , Max E. Van Ghemen , Ludwig Pohl , Herbert Schumann , Uwe Hartmann , Wilfried Wassermann , Meino Heyen , Holger Jurgensen
- Applicant: Dietrich Erdmann , Max E. Van Ghemen , Ludwig Pohl , Herbert Schumann , Uwe Hartmann , Wilfried Wassermann , Meino Heyen , Holger Jurgensen
- Applicant Address: DEX Darmstadt
- Assignee: Merck Patent Gesellschaft mit beschraenkter Haftung
- Current Assignee: Merck Patent Gesellschaft mit beschraenkter Haftung
- Current Assignee Address: DEX Darmstadt
- Priority: DEX3631469 19860916
- Main IPC: C07F5/00
- IPC: C07F5/00 ; C23C16/18 ; C30B25/02
Abstract:
In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.
Public/Granted literature
- US4704947A Bidirectional fluid flow valve Public/Granted day:1987-11-10
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