Invention Grant
- Patent Title: Copolymer from sulfur dioxide and vinyl compound
- Patent Title (中): 二氧化硫和乙烯基化合物的共聚物
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Application No.: US297487Application Date: 1989-01-17
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Publication No.: US4965340APublication Date: 1990-10-23
- Inventor: Minoru Matsuda
- Applicant: Minoru Matsuda
- Applicant Address: JPX Osaka
- Assignee: Chisso Corporation
- Current Assignee: Chisso Corporation
- Current Assignee Address: JPX Osaka
- Main IPC: C08G75/22
- IPC: C08G75/22
Abstract:
A novel copolymer useful as an active ingredient for a positive type resist material to be decomposed by electron beam or X-rays with a high sensitivity and having a superior resistance to dry etching, a process for producing the copolymer and a resist material containing the copolymer are provided, which copolymer consists of 1 to 50% by mol of structural units of ##STR1## and 50 to 99% by mol of structural units of one or more vinyl compounds at least one of which is an aromatic ring-containing vinyl compound and having a number average molecular weight of 500 to 500,000.
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