Invention Grant
US4965340A Copolymer from sulfur dioxide and vinyl compound 失效
二氧化硫和乙烯基化合物的共聚物

  • Patent Title: Copolymer from sulfur dioxide and vinyl compound
  • Patent Title (中): 二氧化硫和乙烯基化合物的共聚物
  • Application No.: US297487
    Application Date: 1989-01-17
  • Publication No.: US4965340A
    Publication Date: 1990-10-23
  • Inventor: Minoru Matsuda
  • Applicant: Minoru Matsuda
  • Applicant Address: JPX Osaka
  • Assignee: Chisso Corporation
  • Current Assignee: Chisso Corporation
  • Current Assignee Address: JPX Osaka
  • Main IPC: C08G75/22
  • IPC: C08G75/22
Copolymer from sulfur dioxide and vinyl compound
Abstract:
A novel copolymer useful as an active ingredient for a positive type resist material to be decomposed by electron beam or X-rays with a high sensitivity and having a superior resistance to dry etching, a process for producing the copolymer and a resist material containing the copolymer are provided, which copolymer consists of 1 to 50% by mol of structural units of ##STR1## and 50 to 99% by mol of structural units of one or more vinyl compounds at least one of which is an aromatic ring-containing vinyl compound and having a number average molecular weight of 500 to 500,000.
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