发明授权
- 专利标题： Liquid composition for forming silica-based coating film
- 专利标题（中）： 用于形成二氧化硅基涂膜的液体组合物
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申请号： US194248申请日： 1988-05-16
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公开(公告)号： US4835017A公开(公告)日： 1989-05-30
- 发明人: Tsutomu Ishikawa , Muneo Nakayama , Akira Hashimoto , Toshihiro Nishimura
- 申请人： Tsutomu Ishikawa , Muneo Nakayama , Akira Hashimoto , Toshihiro Nishimura
- 申请人地址： JPX Kawasaki
- 专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX62-131480 19870529
- 主分类号： C08L83/02
- IPC分类号： C08L83/02 ; C08K5/59 ; C08L83/04 ; C09D4/00 ; C09D183/00 ; C09D183/02 ; H01L23/29
摘要：
A liquid coating composition for forming a silica-based coating film on the surface of a substrate such as a semiconductor silicon wafer. A partial hydrolysis product of an alkoxy silane and an alkoxy or phenoxy compound of pentavalent antimony are dissolved in an organic solvent. As compared with a trivalent antimony compound used in the prior art, the pentavalent antimony compound as an additive is very effective in respect of the improvements in the uniformity and increased thickness of the silica-based coating film prepared from the coating composition as well as storage stability of the coating composition over time.
公开/授权文献
- US5701889A Oxygen breathing controller having a G-sensor 公开/授权日：1997-12-30
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