发明授权
US3658582A Composites, of iib-via binary film compounds on iia-viia binary compound substrate crystals and process therefor
失效
IIA-VIIA二元化合物基体上IIB-VIA二元膜化合物的复合物及其制备方法
- 专利标题： Composites, of iib-via binary film compounds on iia-viia binary compound substrate crystals and process therefor
- 专利标题（中）： IIA-VIIA二元化合物基体上IIB-VIA二元膜化合物的复合物及其制备方法
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申请号： US3658582D申请日： 1970-04-13
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公开(公告)号： US3658582A公开(公告)日： 1972-04-25
- 发明人: COKER JESSE E , GALLI GUIDO
- 申请人： NORTH AMERICAN ROCKWELL
- 专利权人： North American Rockwell Corp
- 当前专利权人： North American Rockwell Corp
- 优先权： US2757970 1970-04-13
- 主分类号： H01L21/363
- IPC分类号： H01L21/363 ; H01L3/00 ; H01L7/34
摘要：
A composite of a substrate crystal is disclosed having a compound of the JQ type formulation where J is at least one element of group IIa and Q is at least one element of group VIIa having a film compound formed on the substrate which is of the JQ type formulation where J is at least one element of the group IIb and Q is at least one element of the group VIa. The process for making these composites shows simple and easily controllable steps and provides criteria for obtaining desired film thickness at relatively rapid deposition rates.
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