Invention Application
- Patent Title: IMPROVED REFLECTOR FOR PROCESS CHAMBER
-
Application No.: US18355938Application Date: 2023-07-20
-
Publication No.: US20250027716A1Publication Date: 2025-01-23
- Inventor: Raja Murali DHAMODHARAN , Shu-Kwan LAU , Shainish NELLIKKA , Enle CHOO , Kalaivanan MOHANADASS , Aniketnitin PATIL
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: F27B17/00
- IPC: F27B17/00 ; H01L21/67 ; H05B3/00
Abstract:
A modular reflective heating system for use in a process chamber is provided. The modular reflective heating system includes: a plurality of connectors; a plurality of lamps, each lamp connected to at least one of the connectors; a reflector including: a base; and a reflective assembly including a first plurality of reflective portions and a second plurality of reflective portions. Each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is connected to the base, and each reflective portion in the first plurality of reflective portions and the second plurality of reflective portions is configured to be individually disconnected from the base. The modular reflective heating system further includes a spare reflective portion configured to replace a first reflective portion in the first plurality of reflective portions or the second plurality of reflective portions.
Information query
