Invention Application
- Patent Title: DOPING ACTIVATION AND OHMIC CONTACT FORMATION IN A SiC ELECTRONIC DEVICE, AND SiC ELECTRONIC DEVICE
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Application No.: US18781808Application Date: 2024-07-23
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Publication No.: US20250022919A1Publication Date: 2025-01-16
- Inventor: Simone RASCUNÀ , Paolo BADALÀ , Anna BASSI , Gabriele BELLOCCHI
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: IT102020000008167 20200417
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/66 ; H01L29/872

Abstract:
A method for manufacturing a SiC-based electronic device, that includes implanting, at a front side of a solid body of SiC having a conductivity of N type, dopant species of P type, thus forming an implanted region that extends in depth in the solid body starting from the front side and has a top surface co-planar with said front side; and generating a laser beam directed towards the implanted region in order to generate heating of the implanted region at temperatures comprised between 1500° C. and 2600° C. so as to form an ohmic contact region including one or more carbon-rich layers, for example graphene and/or graphite layers, in the implanted region and, simultaneously, activation of the dopant species of P type.
Information query
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