Invention Application
- Patent Title: CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
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Application No.: US18770976Application Date: 2024-07-12
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Publication No.: US20250014873A1Publication Date: 2025-01-09
- Inventor: Bo Neilan , Michael Potter , Dhairya Shrivastava
- Applicant: View, Inc.
- Applicant Address: US CA San Jose
- Assignee: View, Inc.
- Current Assignee: View, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/34 ; C23C14/50 ; C23C14/56 ; H01L21/673 ; H01L21/677

Abstract:
Various embodiments herein relate to carriers for supporting one or more substrate as the substrates are passed through a processing apparatus. In many cases, the substrates are oriented in a vertical manner. The carrier may include a frame and vertical support bars that secure the glass to the frame. The carrier may lack horizontal support bars. The carrier may allow for thermal expansion and contraction of the substrates, without any need to provide precise gaps between adjacent pairs of substrates. The carriers described herein substantially reduce the risk of breaking the processing apparatus and substrates, thereby achieving a more efficient process. Certain embodiments herein relate to methods of loading substrates onto a carrier.
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