Invention Application
- Patent Title: LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
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Application No.: US18568919Application Date: 2022-06-15
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Publication No.: US20240375210A1Publication Date: 2024-11-14
- Inventor: Takafumi OGIWARA
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2021-101383 20210618
- International Application: PCT/JP2022/024006 WO 20220615
- Main IPC: B23K26/062
- IPC: B23K26/062

Abstract:
A laser processing apparatus includes a support part, a light source, a spatial light modulator, a converging part, a moving part, and a control part. When a relative movement direction of a first converging point of first processing light and a second converging point of second processing light is set to an X direction, and a direction perpendicular to a Z direction and the X direction is set to a Y direction, the control part controls the spatial light modulator and the moving part such that the first converging point and the second converging point relatively move along a first line and a second line in the object in a state where the first converging point and the second converging point are shifted from each other in each of the X direction and the Y direction.
Information query
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