LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
Abstract:
A laser processing apparatus includes a support part, a light source, a spatial light modulator, a converging part, a moving part, and a control part. When a relative movement direction of a first converging point of first processing light and a second converging point of second processing light is set to an X direction, and a direction perpendicular to a Z direction and the X direction is set to a Y direction, the control part controls the spatial light modulator and the moving part such that the first converging point and the second converging point relatively move along a first line and a second line in the object in a state where the first converging point and the second converging point are shifted from each other in each of the X direction and the Y direction.
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