Invention Publication
- Patent Title: VARIABLE SIZE FIN STRUCTURES
-
Application No.: US18770792Application Date: 2024-07-12
-
Publication No.: US20240363736A1Publication Date: 2024-10-31
- Inventor: Su-Hao Liu , Huicheng Chang , Chien-Tai Chan , Liang-Yin Chen , Yee-Chia Yeo , Szu-Ying Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- The original application number of the division: US16996665 2020.08.18
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L29/78

Abstract:
The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a first fin structure with a first height and a first width formed over the substrate, a second fin structure with a second height and a second width formed over the substrate, and an insulating stack formed over lower portions of the first and second fin structures. The second height can be substantially equal to the first height and the second width can be greater than the first width. A top surface of the insulating stack can be below top surfaces of the first and second fin structures.
Information query
IPC分类: