发明公开
- 专利标题: METHOD FOR FORMING SEMICONDUCTOR DIE PACKAGE WITH THERMAL MANAGEMENT FEATURES
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申请号: US18765021申请日: 2024-07-05
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公开(公告)号: US20240363474A1公开(公告)日: 2024-10-31
- 发明人: Yu-Sheng LIN , Po-Yao LIN , Shu-Shen YEH , Chin-Hua WANG , Shin-Puu JENG
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 分案原申请号: US17230112 2021.04.14
- 主分类号: H01L23/367
- IPC分类号: H01L23/367 ; H01L21/48 ; H01L23/31 ; H01L23/373
摘要:
A method for forming a semiconductor die package is provided. The method includes bonding a first semiconductor die and a second semiconductor die to a package substrate; disposing a lid structure over the package substrate and over the first and second semiconductor dies, wherein the lid structure has a first opening exposing the second semiconductor die; attaching the lid structure to the first semiconductor die using a first thermal interface material (TIM) layer; disposing a heat sink over the lid structure, wherein the heat sink has a first portion located over the lid structure, and a second portion extending into the first opening of the lid structure; and attaching the second portion of the heat sink to the second semiconductor die using a second TIM layer, wherein the first TIM layer has a thermal conductivity higher than a thermal conductivity of the second TIM layer.
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