- 专利标题: FLASH MEMORY CELL, WRITING METHOD AND ERASING METHOD THEREFOR
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申请号: US18686598申请日: 2022-08-25
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公开(公告)号: US20240355396A1公开(公告)日: 2024-10-24
- 发明人: Jiayong Jiang , Zhendong Shi
- 申请人: Beijing PXMicro Technology Co. Ltd.
- 申请人地址: CN Beijing
- 专利权人: Beijing PXMicro Technology Co. Ltd.
- 当前专利权人: Beijing PXMicro Technology Co. Ltd.
- 当前专利权人地址: CN Beijing
- 优先权: CN 2110987914.1 2021.08.26 CN 2110987922.6 2021.08.26 CN 2110988483.0 2021.08.26
- 国际申请: PCT/CN2022/114958 2022.08.25
- 进入国家日期: 2024-02-26
- 主分类号: G11C16/14
- IPC分类号: G11C16/14 ; G11C16/04 ; H01L29/66 ; H01L29/788 ; H10B41/27
摘要:
Provided are a flash memory cell and associated manufacturing, writing, and erasing methods. The flash memory cell comprises a substrate with a deep well region and a well region on which a first and second storage transistor are provided to store separate data and a gating transistor provided horizontally between them to perform a gating operation. The three transistors are connected in series, with a source region of the first storage transistor and a drain region of the second storage transistor connected to separate electrodes of the flash memory cell. The storage transistors have a gate structure composed vertically of a channel region, a gate dielectric stack, a gate electrode, and a hard mask blocking portion. The writing method uses low operation power and fast programming to increase write throughput. The erasing method uses a combined tunneling mechanism to enable low operation power, fast erasing, and improved storage reliability.
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