- 专利标题: SEMICONDUCTOR DEVICE WITH DIFFERENT SIZED EPITAXIAL STRUCTURES
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申请号: US18183468申请日: 2023-03-14
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公开(公告)号: US20240313054A1公开(公告)日: 2024-09-19
- 发明人: Jianwei PENG , Hong Yu
- 申请人: GLOBALFOUNDRIES U.S. Inc.
- 申请人地址: US NY Malta
- 专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人地址: US NY Malta
- 主分类号: H01L29/08
- IPC分类号: H01L29/08 ; H01L21/8238 ; H01L29/417 ; H01L29/423 ; H01L29/66
摘要:
An apparatus has a first gate structure of a core device on a substrate, a first L-shaped spacer covering a sidewall of the first gate and part of the substrate adjacent to the first gate, a first raised source/drain (S/D) structure on the substrate and spaced apart from the first gate by the first L-shaped spacer, a second gate of an I/O device on the substrate, a second L-shaped spacer covering a sidewall of the second gate and part of the substrate adjacent to the second gate, and a second raised S/D structure spaced apart from the second gate by the second L-shaped spacer. The first and second L-shaped spacers have the same spacer width, and a distance between the first gate structure and a sidewall of the first S/D structure is less than a distance between the second gate structure and a sidewall of the second S/D structure.
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