- 专利标题: QUARTZ GLASS CRUCIBLE, MANUFACTURING METHOD THEREOF, AND MANUFACTURING METHOD OF SILICON SINGLE CRYSTAL
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申请号: US18290547申请日: 2022-02-09
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公开(公告)号: US20240279106A1公开(公告)日: 2024-08-22
- 发明人: Masami OHARA , Hiroshi KISHI , Eriko KITAHARA , Hideki FUJIWARA
- 申请人: SUMCO Corporation
- 申请人地址: JP Tokyo
- 专利权人: SUMCO Corporation
- 当前专利权人: SUMCO Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP 21087314 2021.05.25
- 国际申请: PCT/JP2022/005166 2022.02.09
- 进入国家日期: 2023-11-14
- 主分类号: C03C3/06
- IPC分类号: C03C3/06 ; C03C17/00 ; C30B15/10 ; C30B29/06
摘要:
A quartz glass crucible includes a crucible base body having silica glass and a coating film containing a crystallization accelerator and formed on the inner surface of the crucible base body. The coating film has a peel strength of 0.3 kN/m or more.
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