Invention Publication
- Patent Title: SUSCEPTOR IMPROVEMENT
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Application No.: US18108272Application Date: 2023-02-10
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Publication No.: US20240274464A1Publication Date: 2024-08-15
- Inventor: Matthew Gabriel GOODMAN , John TOLLE , Shawn THOMAS , Lori D. WASHINGTON , Xinning LUAN , Zhepeng CONG
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/687
- IPC: H01L21/687
Abstract:
A susceptor for processing a substrate is provided including a base and a coating formed over the base. The base includes an outer rim having an inner edge, an outer edge, and a top connecting the inner edge to the outer edge; and an inner dish disposed inside the outer rim and coupled to the outer rim, the inner dish recessed from the top of the outer rim, the inner dish having a front side and an opposing back side. The coating has an outer surface that includes a first portion formed over the front side of the inner dish. The first portion of the outer surface of the coating includes a first region and a second region, the first region has a first average level of roughness, the second region has a second average level of roughness.
Information query
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