Invention Publication
- Patent Title: VIBRATOR DEVICE
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Application No.: US18427378Application Date: 2024-01-30
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Publication No.: US20240261819A1Publication Date: 2024-08-08
- Inventor: Ryuta Nishizawa , Junichi Takeuchi
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 23012741 2023.01.31
- Main IPC: B06B1/02
- IPC: B06B1/02 ; B06B1/06

Abstract:
A vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a second surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to a first surface at a bonding portion. A first circuit of the integrated circuit includes a first circuit element disposed in a second region surrounded by a first region that overlaps the bonding portion in a plan view. The first circuit element is a passive element or a transistor, and θ
Information query
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