Invention Publication

VIBRATOR DEVICE
Abstract:
A vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a second surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to a first surface at a bonding portion. A first circuit of the integrated circuit includes a first circuit element disposed in a second region surrounded by a first region that overlaps the bonding portion in a plan view. The first circuit element is a passive element or a transistor, and θ
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