Invention Publication
- Patent Title: Microelectromechanical System for Moving a Mechanical Part in Two Opposite Directions
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Application No.: US18562630Application Date: 2022-05-20
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Publication No.: US20240243672A1Publication Date: 2024-07-18
- Inventor: Thierry CÔTE , Patrice MINOTTI , Gilles BOURBON , Patrice LE MOAL
- Applicant: SILMACH , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) , UNIVERSITE DE FRANCHE-COMTE
- Applicant Address: FR BESANCON
- Assignee: SILMACH,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS),UNIVERSITE DE FRANCHE-COMTE
- Current Assignee: SILMACH,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS),UNIVERSITE DE FRANCHE-COMTE
- Current Assignee Address: FR BESANCON
- Priority: FR 2105347 2021.05.21
- International Application: PCT/FR2022/050963 2022.05.20
- Date entered country: 2023-11-20
- Main IPC: H02N1/00
- IPC: H02N1/00 ; B81B3/00
Abstract:
The invention relates to a microelectromechanical system (10) comprising a drive module (200) comprising:
a fixed drive portion (210),
a movable drive portion (220), and
a suspension (230),
the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a first direction (A), as a result of an electrostatic force, which causes an elastic deformation of the suspension (230), and the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a second direction (B), opposite to the first direction (A), as a result of an elastic return force generated by the suspension (230),
the actuator (11) also comprising a stop (24) limiting the movement of the first movable portion (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled.
a fixed drive portion (210),
a movable drive portion (220), and
a suspension (230),
the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a first direction (A), as a result of an electrostatic force, which causes an elastic deformation of the suspension (230), and the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a second direction (B), opposite to the first direction (A), as a result of an elastic return force generated by the suspension (230),
the actuator (11) also comprising a stop (24) limiting the movement of the first movable portion (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled.
Information query
